JPS6214944B2 - - Google Patents

Info

Publication number
JPS6214944B2
JPS6214944B2 JP52106673A JP10667377A JPS6214944B2 JP S6214944 B2 JPS6214944 B2 JP S6214944B2 JP 52106673 A JP52106673 A JP 52106673A JP 10667377 A JP10667377 A JP 10667377A JP S6214944 B2 JPS6214944 B2 JP S6214944B2
Authority
JP
Japan
Prior art keywords
substrate
heat
layer
thermal conductivity
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52106673A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440583A (en
Inventor
Kenji Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10667377A priority Critical patent/JPS5440583A/ja
Publication of JPS5440583A publication Critical patent/JPS5440583A/ja
Publication of JPS6214944B2 publication Critical patent/JPS6214944B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP10667377A 1977-09-07 1977-09-07 Semiconductor device Granted JPS5440583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10667377A JPS5440583A (en) 1977-09-07 1977-09-07 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10667377A JPS5440583A (en) 1977-09-07 1977-09-07 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5440583A JPS5440583A (en) 1979-03-30
JPS6214944B2 true JPS6214944B2 (en]) 1987-04-04

Family

ID=14439581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10667377A Granted JPS5440583A (en) 1977-09-07 1977-09-07 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5440583A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01214048A (ja) * 1988-02-23 1989-08-28 Fujitsu Ltd 半導体集積装置
US6331722B1 (en) 1997-01-18 2001-12-18 Semiconductor Energy Laboratory Co., Ltd. Hybrid circuit and electronic device using same
WO2011001494A1 (ja) * 2009-06-29 2011-01-06 富士通株式会社 半導体装置およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342513B2 (en]) * 1973-11-14 1978-11-11
JPS5147371A (en) * 1974-10-21 1976-04-22 Fujitsu Ltd Handotaisochi

Also Published As

Publication number Publication date
JPS5440583A (en) 1979-03-30

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